Specifications
| SEMI Standard | 2″ (50.8mm) | 3″ (76.2mm) | 4″ (100mm) | 5″ (125mm) | 6″ (150mm) | 8″ (200mm) |
|---|
| Diameter | 50.8 ± 0.38mm | 76.2 ± 0.63mm | 100 ± 0.5mm | 125 ± 0.5mm | 150 ± 0.2mm | 200 ± 0.2mm |
| Thickness | 279 ± 25µm | 381 ± 25µm | 525 ± 20µm or 625 ± 20µm | 625 ± 20µm | 675 ± 20µm or 625 ± 15µm | 725 ± 20µm |
| Primary Flat Length | 15.88 ± 1.65mm | 22.22 ± 3.17mm | 32.5 ± 2.5mm | 42.5 ± 2.5mm | 57.5 ± 2.5mm | Notch |
| Secondary Flat Length | 8 ± 1.65mm | 11.18 ± 1.52mm | 18 ± 2.0mm | 27.5 ± 2.5mm | 37.5 ± 2.5mm | NA |
| Primary Flat Location | {110} ± 1° | {110} ± 1° | {110} ± 1° | {110} ± 1° | {110} ± 1° | {110} ± 1° |
