Specifications
| Parameter | Value |
|---|---|
| Diameter | 25mm-450mm |
| Growth method | CZ |
| Dopant | P, P+; Boron |
| N, N+; phosphorus / AS / SB | |
| Orientation | 1-0-0 / 1-1-1 / 1-1-0 |
| Resistivity (P-Type) | 0.001-100 Ohm-cm |
| Resistivity (N-Type Phos) | 0.0007-100 Ohm-cm |
| Resistivity (N-Type Sb) | 0.006-0.02 Ohm-cm |
| Resistivity (N-Type As) | 0.001-0.01 Ohm-cm |
| Oxygen content | 6-18ppm (New ASTM) |
| Carbon content | 0.5ppma Max |
| Metal content | 5×10¹⁰ / cm³ Max |
| Surface Metal | 5×10¹⁰ / cm² Max |
| Dislocation | None |